Intelsi-L Series > Intelsi-L Series
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제품 정보
제품 상세설명
Overview
Korea Vacuum Tech, Ltd. (KVT) is proud to introduce the latest revolutionary addition to
our product line, the Intelsi-M Multi-Function PVD system. Despite its compact
convenient size, easy operation and affordability, functionality is in no way sacrificed.
The Intelsi-M is capable of thin film deposition utilizing Sputter, E-Beam and Thermal
Source technologies and can accommodate variable material types in sample sizes up to
4" (101.2mm). The modular design of the Intelsi-M makes it highly configurable to meet
specific customer needs and numerous stock options are also available. A fully
automated Laptop PC helps round out this extremely usable yet robust diminutive
package.
Advantages
≻ Easy to install, easy to operate
≻ Precise reproducible coatings - consistent
≻ Fully adaptable to a wide range of specimens
≻ Compact design / small footprint
≻ Quick and simple loading / unloading
Features
≻ Extreme versatility
≻ High capacity vacuum pumping
≻ Fully automated PC control
≻ Capable of producing very thin resultant films
Overview
Korea Vacuum Tech, Ltd. (KVT) is proud to introduce the latest revolutionary addition to
our product line, the Intelsi-M Multi-Function PVD system. Despite its compact
convenient size, easy operation and affordability, functionality is in no way sacrificed.
The Intelsi-M is capable of thin film deposition utilizing Sputter, E-Beam and Thermal
Source technologies and can accommodate variable material types in sample sizes up to
4" (101.2mm). The modular design of the Intelsi-M makes it highly configurable to meet
specific customer needs and numerous stock options are also available. A fully
automated Laptop PC helps round out this extremely usable yet robust diminutive
package.
Advantages
≻ Easy to install, easy to operate
≻ Precise reproducible coatings - consistent
≻ Fully adaptable to a wide range of specimens
≻ Compact design / small footprint
≻ Quick and simple loading / unloading
Features
≻ Extreme versatility
≻ High capacity vacuum pumping
≻ Fully automated PC control
≻ Capable of producing very thin resultant films
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Specifications
제품 Specifications
Specifications
ITEM
SPECIFICATIONS
Process Chamber
Stainless steel
Vacuum Pumping Station
Turbo molecular pump
Loadlock Chamber
Stainless steel
Substrate Heating Unit
SiC / 4”
Sample Loading/Unloading Unit
Manual
Pressure Control Unit
Auto
Vacuum Gauge Controller
ATM ~ 1.0E-10Torr
Gas Supply Unit
MFC (Ar, O2, etc..)
Power Supply Unit
DC / AC
Deposition Source
Sputtering Cathode 1EA, Thermal Source 2EA
Target & Boat
3" Target, 1/2” (w) x 2 (L) x 0.2 (T) Boat
Film Thickness Uniformity
Less than ±5%
Ultimate Pressure
Less than 5.0E-7Torr
Specifications
ITEM
SPECIFICATIONS
Process Chamber
Stainless steel
Vacuum Pumping Station
Turbo molecular pump
Loadlock Chamber
Stainless steel
Substrate Heating Unit
SiC / 4”
Sample Loading/Unloading Unit
Manual
Pressure Control Unit
Auto
Vacuum Gauge Controller
ATM ~ 1.0E-10Torr
Gas Supply Unit
MFC (Ar, O2, etc..)
Power Supply Unit
DC / AC
Deposition Source
Sputtering Cathode 1EA, Thermal Source 2EA
Target & Boat
3" Target, 1/2” (w) x 2 (L) x 0.2 (T) Boat
Film Thickness Uniformity
Less than ±5%
Ultimate Pressure
Less than 5.0E-7Torr
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Options
제품 Options
Options
ITEM
SPECIFICATIONS
Description
Intelsi-LL
Intelsi-LS1
Intelsi-LS2
Intelsi-LE
Chamber
SUS304, Circle type, Top door open
Dimensions
M: 830(W) x 892(D) x 1150(H)
E-Beam Source
Single pocket – 1.5cc
N/A
N/A
4cc-6pockets/7cc-
4pockets
E-Beam Power Supply
3kW E-Beam power
supply
N/A
N/A
6kW E-Beam power
supply
Gas Supply
Ar MFC control (Optional O2 MFC, N2 MFC)
N/A
Pressure Control
Manual throttle valve (Optional Auto Throttle Valve)
N/A
Process
Ultimate pressure : less than 5 x 10E-6 torr
Deposition Uniformity
less than ±5% @ 2 inch
less than ±5% @ 3 inch
less than ±5% @ 3 inch
Sputtering Source
Target size : 1 inch
Target: 1 inch – 3ea
Target size : 3inch – 3ea
N/A
Sputtering Power Supply
1kW RF Power Supply
1kW DC Power Supply
N/A
Substrate
Size : up to 4” piece
up to 4” piece
up to 4” piece
Rotation Speed
Rotation : 0 – 30 RPM
Heater
Heating : up to 800°C by SiC heating element
System Control
PLC based PC control
System Software
Software : Labview
Thermal Source
W boat or
basket type
N/A
N/A
N/A
Thermal Power Supply
3kW DC power supply
N/A
N/A
N/A
Utilities
Electric Power : 220V, 3P, 30A
PCW : 1 ~ 2 kgf/cm2, 10 L/M
CDA : 6 ~ 7 kgf/cm2
Vacuum Gauge
PLC interface communication
Vacuum Pumping
Turbo Molecular Pump + Rotary pump
Weight
~ 300 kg (~660 pound )
Options
ITEM
SPECIFICATIONS
Description
Intelsi-LL
Intelsi-LS1
Intelsi-LS2
Intelsi-LE
Chamber
SUS304, Circle type, Top door open
Dimensions
M: 830(W) x 892(D) x 1150(H)
E-Beam Source
Single pocket – 1.5cc
N/A
N/A
4cc-6pockets/7cc-
4pockets
E-Beam Power Supply
3kW E-Beam power
supply
N/A
N/A
6kW E-Beam power
supply
Gas Supply
Ar MFC control (Optional O2 MFC, N2 MFC)
N/A
Pressure Control
Manual throttle valve (Optional Auto Throttle Valve)
N/A
Process
Ultimate pressure : less than 5 x 10E-6 torr
Deposition Uniformity
less than ±5% @ 2 inch
less than ±5% @ 3 inch
less than ±5% @ 3 inch
Sputtering Source
Target size : 1 inch
Target: 1 inch – 3ea
Target size : 3inch – 3ea
N/A
Sputtering Power Supply
1kW RF Power Supply
1kW DC Power Supply
N/A
Substrate
Size : up to 4” piece
up to 4” piece
up to 4” piece
Rotation Speed
Rotation : 0 – 30 RPM
Heater
Heating : up to 800°C by SiC heating element
System Control
PLC based PC control
System Software
Software : Labview
Thermal Source
W boat or
basket type
N/A
N/A
N/A
Thermal Power Supply
3kW DC power supply
N/A
N/A
N/A
Utilities
Electric Power : 220V, 3P, 30A
PCW : 1 ~ 2 kgf/cm2, 10 L/M
CDA : 6 ~ 7 kgf/cm2
Vacuum Gauge
PLC interface communication
Vacuum Pumping
Turbo Molecular Pump + Rotary pump
Weight
~ 300 kg (~660 pound )
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Control
제품 Control
System Control
Vacuum
This figure shows the pumping screen. This screen consists of each valve, pump action button, and automatic button. The biggest difference from Semi-Auto is the automatic button, so if you proceed with these buttons in sequence, one sample will be completed.
Process
The figure shows the process screen. This screen shows the buttons that control the gas flow rate, valve, power etc. required for the process.
Graph
The figure shows the graph screen. This screen shows vacuum degree, power amount and so on. You can record that data, make it into a file, and compare it with the previous data.
Message
The figure is a graph screen. The picture consists of status message and notification messages.
System Control
Vacuum
This figure shows the pumping screen. This screen consists of each valve, pump action button, and automatic button. The biggest difference from Semi-Auto is the automatic button, so if you proceed with these buttons in sequence, one sample will be completed.
Process
The figure shows the process screen. This screen shows the buttons that control the gas flow rate, valve, power etc. required for the process.
Graph
The figure shows the graph screen. This screen shows vacuum degree, power amount and so on. You can record that data, make it into a file, and compare it with the previous data.
Message
The figure is a graph screen. The picture consists of status message and notification messages.
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사용후기
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상품문의
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배송/교환정보
[배송]
배송 안내 입력전입니다.[교환]
교환/반품 안내 입력전입니다.
선택된 옵션
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Intelsi-L Series+0원
