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E-BEAM Series
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Applications
Multi-function System
Evaporator
Sputter
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ALD
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ETCHER
Cluster
Materials Division
E-BEAM Series
Thermal Series
E-beam & Thermal Series
iBAD Series
E-beam & Sputter Series
Dual E-Beam Co-Deposition System [KVE-ED Series]
Complete alloy and multilayer thin film solutions realized in a single process.(두개의 이빔으로 동시 증착이 가능한 진공 시스템)
E-Beam Evaporator System [KVE-E4000 Series]
E-Beam evaporator system optimized for research purposes(연구 환경에 최적화 된 이빔 자동 증착 시스템)
E-Beam Evaporator System with Loadlock [KVE-E4000L Series]
E-Beam evaporator system optimized for research purposes with loadlock chamber(연구 환경에 최적화 된 로드락 챔버 구성의 이빔 자동 증착 시스템)
E-Beam Evaporator System [KVE-E2000 Series]
The most basic e-beam evaporation system(가장 기본적인 구성의 이빔 증착 시스템)
E-Beam Evaporator System with Loadlock [KVE-E2000L Series]
The most basic e-beam evaporation system with loadlock chamber(로드락 챔버가 구성 되어 있는 가장 기본적인 이빔 증착 시스템)
Glancing Angle Deposition System [KVE-EG Series]
E-beam system capable of oblique angle deposition(경사각 증착이 가능한 이빔 증착 시스템)
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