Overview

 An evaporator uses an electric resistance heater or high-energy beam to melt material

and to raise its vapor pressure to a useful range. This process takes place in a high

vacuum state to allow the vapor to reach the substrate without reacting with or

scattering against other gas-phase atoms in the chamber while reducing the

incorporation of impurities from the residual gas in the vacuum chamber. The KVE Series

evaporation systems are capable of fabricating multi-layer thin films by applying this

co-deposition process.

Features

≻ Excellent Thickness Uniformity

        The KVE Series KVE-2000L System provide excellent thickness uniformity of resultant

        films.

     ≻ Always maintain high vacuum degree in process

        These systems have a process chamber and a loadlock chamber. Loadlock chamber is used

        for sample loading. So process chamber is always maintained high vacuum state

     ≻ Semi-auto system control by PLC

specifications

System Control

Pumping   The figure shows the pumping screen. Pumping screens have valves and pumps. The pump and valve are easily operated with one touch.
	Pocket   The picture shows the pocket screen. When you press the poc  ket button on this screen, the e-beam index rotates and you   can see the source you selected.
Interlock   This picture shows the interlock screen. Basically, the interlock is set so that it does not work when you deviate from the correct method of use for your safety.