KVE-TG4000 > OLED R&D Series
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제품 정보
제품 상세설명
Overview
KVT has developed the evaporator system with high precision deposition rate control
and unique design & technology. KVE series is designed and manufactured to
deposition equipment with variable item. KVE-TG Series is consisted of deposition
system with glove box system. These systems can prevent the oxidation of sample from external air.
If you use the mask when you deposit the thin film, you can make the device without venting the chamber.
Also if you enter the deposition condition to recipe, you will always get the thin film of same characteristic.
Features
≻ Easy sample loading
The system is installed in an expanded form of the process chamber which placed above the main process chamber. Therefore it doesn’t need the loading arm. So you can make a sample loading very simply.
≻ Prevent the oxidation of sample
When the sample is taken out of the chamber, it is immediately connected to the glove box, protecting the sample from oxidation.
Overview
KVT has developed the evaporator system with high precision deposition rate control
and unique design & technology. KVE series is designed and manufactured to
deposition equipment with variable item. KVE-TG Series is consisted of deposition
system with glove box system. These systems can prevent the oxidation of sample from external air.
If you use the mask when you deposit the thin film, you can make the device without venting the chamber.
Also if you enter the deposition condition to recipe, you will always get the thin film of same characteristic.
Features
≻ Easy sample loading
The system is installed in an expanded form of the process chamber which placed above the main process chamber. Therefore it doesn’t need the loading arm. So you can make a sample loading very simply.
≻ Prevent the oxidation of sample
When the sample is taken out of the chamber, it is immediately connected to the glove box, protecting the sample from oxidation.
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Specifications
제품 Specifications
Specifications
ITEM
SPECIFICATIONS
Process Chamber
Stainless steel
Vacuum Pumping Station
TMP / Cryo pump
Loadlock Chamber
N/A
Substrate Unit
Rotation / Heating / Cooling / Tilt
Sample Size
4” or more
Power Supply Unit
10V,300A / 10V,100A
Source Type & Number
Boat, Crucible / Two or more
Process Control Type
DC, Auto
Film Thickness Uniformity
< ±5%
Ultimate Pressure
< 5.0E-7Torr
Specifications
ITEM
SPECIFICATIONS
Process Chamber
Stainless steel
Vacuum Pumping Station
TMP / Cryo pump
Loadlock Chamber
N/A
Substrate Unit
Rotation / Heating / Cooling / Tilt
Sample Size
4” or more
Power Supply Unit
10V,300A / 10V,100A
Source Type & Number
Boat, Crucible / Two or more
Process Control Type
DC, Auto
Film Thickness Uniformity
< ±5%
Ultimate Pressure
< 5.0E-7Torr
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Options
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Control
제품 Control
System Control
Vacuum
This screen shows the pumping screen. This screen consists of each valve, pump action button, automatic button. The biggest difference from Semi Auto is the automatic button, so if you proceed with these buttons in sequence, one sample will be completed.
Recipe
The figure shows the recipe screen. This screen contains boxes for entering the process conditions required for deposition. Input all the boxes and press the Process button to automatically deposit according to the input process conditions.
Graph
The figure shows the graph screen. This screen shows vacuum degree, power amount thickness, deposition rate and so on. You can record that data and make it into a file and compare it with the previous data.
Message
The picture is a graph screen. The picture consists of status message notification messages
System Control
Vacuum
This screen shows the pumping screen. This screen consists of each valve, pump action button, automatic button. The biggest difference from Semi Auto is the automatic button, so if you proceed with these buttons in sequence, one sample will be completed.
Recipe
The figure shows the recipe screen. This screen contains boxes for entering the process conditions required for deposition. Input all the boxes and press the Process button to automatically deposit according to the input process conditions.
Graph
The figure shows the graph screen. This screen shows vacuum degree, power amount thickness, deposition rate and so on. You can record that data and make it into a file and compare it with the previous data.
Message
The picture is a graph screen. The picture consists of status message notification messages
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사용후기
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상품문의
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배송/교환정보
[배송]
배송 안내 입력전입니다.[교환]
교환/반품 안내 입력전입니다.
선택된 옵션
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KVE-TG4000+0원
