KVE-TG2000L > OLED R&D Series
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제품 정보
제품 상세설명
Overview
KVT has developed the evaporator system with high precision deposition rate control
and unique design & technology. KVE series is designed and manufactured to
deposition equipment with variable item. KVE-TG Series is consisted of deposition
system with glove box system. These systems can prevent the oxidation of sample from external air.
If you use the mask when you deposit the thin film, you can make the device without venting the chamber.
Also if you enter the deposition condition to recipe, you will always get the thin film of same characteristic.
Features
≻ Easy sample loading
The system is installed in an expanded form of the process chamber which placed above the main process chamber. Therefore it doesn’t need the loading arm. So you can make a sample loading very simply.
≻ Prevent the oxidation of sample
When the sample is taken out of the chamber, it is immediately connected to the glove box, protecting the sample from oxidation.
Overview
KVT has developed the evaporator system with high precision deposition rate control
and unique design & technology. KVE series is designed and manufactured to
deposition equipment with variable item. KVE-TG Series is consisted of deposition
system with glove box system. These systems can prevent the oxidation of sample from external air.
If you use the mask when you deposit the thin film, you can make the device without venting the chamber.
Also if you enter the deposition condition to recipe, you will always get the thin film of same characteristic.
Features
≻ Easy sample loading
The system is installed in an expanded form of the process chamber which placed above the main process chamber. Therefore it doesn’t need the loading arm. So you can make a sample loading very simply.
≻ Prevent the oxidation of sample
When the sample is taken out of the chamber, it is immediately connected to the glove box, protecting the sample from oxidation.
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Specifications
제품 Specifications
Specifications
ITEM
SPECIFICATIONS
Process Chamber
Stainless steel
Vacuum Pumping Station
TMP / Cryo pump
Loadlock Chamber
Glove box intergrated
Substrate Unit
Rotation / Heating
Sample Size
4” or more
Power Supply Unit
10V,300A / 10V,100A
Source Type & Number
Boat, Crucible / Two or more
Process Control Type
PLC Semi-auto
Film Thickness Uniformity
< ±5%
ltimate Pressure
< 5.0E-7Torr
Specifications
ITEM
SPECIFICATIONS
Process Chamber
Stainless steel
Vacuum Pumping Station
TMP / Cryo pump
Loadlock Chamber
Glove box intergrated
Substrate Unit
Rotation / Heating
Sample Size
4” or more
Power Supply Unit
10V,300A / 10V,100A
Source Type & Number
Boat, Crucible / Two or more
Process Control Type
PLC Semi-auto
Film Thickness Uniformity
< ±5%
ltimate Pressure
< 5.0E-7Torr
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Options
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Control
제품 Control
System Control
Pumping
The figure shows the pumping screen. Pumping screens
have valves and pumps. The pump and valve are easily
operated with one touch.
Interlock
This picture shows the interlock screen. Basically,
the interlock is set so that it does not work when you
deviate from the correct method of use for your safety.
System Control
Pumping
The figure shows the pumping screen. Pumping screens
have valves and pumps. The pump and valve are easily
operated with one touch.
Interlock
This picture shows the interlock screen. Basically,
the interlock is set so that it does not work when you
deviate from the correct method of use for your safety.
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사용후기
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상품문의
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배송/교환정보
[배송]
배송 안내 입력전입니다.[교환]
교환/반품 안내 입력전입니다.
선택된 옵션
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KVE-TG2000L+0원
