KVP-2000 > PLD
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제품 정보
제품 상세설명
Overview
PLD (Pulsed Laser Deposition) is a physical deposition method that utilizes a high energy
focused laser. Conceptually and experimentally. PLD is extremely simple. It consists of a
target holder and a substrate holder housed in a vacuum chamber. A set of optical
components focus and raster a high-power laser (the external source) into a
concentrated beam over the target surface which vaporizes target materials to
ultimately deposite thin film.
Advantages
≻ Allows for the use of various targets and for the in-situ deposition of multi-layers
≻ Consists of simple hardware
≻ Simple system maintenance
≻ Various aspect of beam-target-substrate positioning
≻ Temperature uniformity of substrate
≻ Pyrometer Port
≻ Laser strength measurement port
≻ Ellipsometry port
Overview
PLD (Pulsed Laser Deposition) is a physical deposition method that utilizes a high energy
focused laser. Conceptually and experimentally. PLD is extremely simple. It consists of a
target holder and a substrate holder housed in a vacuum chamber. A set of optical
components focus and raster a high-power laser (the external source) into a
concentrated beam over the target surface which vaporizes target materials to
ultimately deposite thin film.
Advantages
≻ Allows for the use of various targets and for the in-situ deposition of multi-layers
≻ Consists of simple hardware
≻ Simple system maintenance
≻ Various aspect of beam-target-substrate positioning
≻ Temperature uniformity of substrate
≻ Pyrometer Port
≻ Laser strength measurement port
≻ Ellipsometry port
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Specifications
제품 Specifications
Specifications
ITEM
SPECIFICATIONS
Uniformity Zone of Substrate Heating
Ø15 mm
Substrate Temperature
850°C ± 5°C in oxygen
Operating Pressure
0.01 mTorr ~ 10 Torr
Target Carousel
one inch (25.4mm) diameter for four targets
Normal Angle of Incidence
Laser beam on target : 45° with respect to target normal
Operational Wavelength
248 nm (KrF)
Base Pressure
2.0E-7 Torr using turbo molecular pump
Specifications
ITEM
SPECIFICATIONS
Uniformity Zone of Substrate Heating
Ø15 mm
Substrate Temperature
850°C ± 5°C in oxygen
Operating Pressure
0.01 mTorr ~ 10 Torr
Target Carousel
one inch (25.4mm) diameter for four targets
Normal Angle of Incidence
Laser beam on target : 45° with respect to target normal
Operational Wavelength
248 nm (KrF)
Base Pressure
2.0E-7 Torr using turbo molecular pump
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Options
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Control
제품 Control
System Control
Pumping
The figure shows the pumping screen. Pumping
screens have valves and pumps. The pump and
valve are easily operated with one touch
Servo
The picture shows the servo screen. When you press
the target button on this screen, target is rotated and
you can see the target you selected. It also includes a
target trigger function.
Shutter
This screen shows the shutter screen. There are
buttons on the screen to operate the substrate
shutter, the gas valve, and the sputter gun shutter.
Gauge Control
This screen shows the gauge control screen. There are
buttons on the screen to operate the guage on/off, set point
set, Ion gauge on/off.
Interlock
This picture shows the interlock screen. Basically, the interlock is set so that it does not work when you deviate from the correct method of use for your safety.
System Control
Pumping
The figure shows the pumping screen. Pumping
screens have valves and pumps. The pump and
valve are easily operated with one touch
Servo
The picture shows the servo screen. When you press
the target button on this screen, target is rotated and
you can see the target you selected. It also includes a
target trigger function.
Shutter
This screen shows the shutter screen. There are
buttons on the screen to operate the substrate
shutter, the gas valve, and the sputter gun shutter.
Gauge Control
This screen shows the gauge control screen. There are
buttons on the screen to operate the guage on/off, set point
set, Ion gauge on/off.
Interlock
This picture shows the interlock screen. Basically, the interlock is set so that it does not work when you deviate from the correct method of use for your safety.
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사용후기
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상품문의
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배송/교환정보
[배송]
배송 안내 입력전입니다.[교환]
교환/반품 안내 입력전입니다.
선택된 옵션
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KVP-2000+0원
