KVC-C2000L > CVD
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제품 정보
제품 상세설명
Overview
Korea Vacuum Tech, Inc. (KVT) is proud to introduce the latest revolutionary addition to our product line, the CVD system. Chemical Vapor Deposition is a chemical reactive process used to produce high –purity, high performance solid materials in a vacuum state. In a typical CVD process, the water(substrate) is exposed to one or more volatile precursors which react and / or decompose on the substrate surface to produce a desired deposit. Thermal Chemical Vapor Deposition(Thermal CVD) is a unique form of the CVD process used primarily to deposit thin lms from a gaseous state(Vapor) to a solid state on some substrate. Thermal CVD is dependent upon thermal energy to create of maintain a chemical reaction.
Features
≻ 3 Zone Furnace for temperature up to 1000℃
≻ Sample size : up to 2”
≻ Easy to sample loading & unloading by loading bar
≻ 3” dia. Quartz Tube
≻ Operation pressure ~ 1Torr
≻ No water cooling
Overview
Korea Vacuum Tech, Inc. (KVT) is proud to introduce the latest revolutionary addition to our product line, the CVD system. Chemical Vapor Deposition is a chemical reactive process used to produce high –purity, high performance solid materials in a vacuum state. In a typical CVD process, the water(substrate) is exposed to one or more volatile precursors which react and / or decompose on the substrate surface to produce a desired deposit. Thermal Chemical Vapor Deposition(Thermal CVD) is a unique form of the CVD process used primarily to deposit thin lms from a gaseous state(Vapor) to a solid state on some substrate. Thermal CVD is dependent upon thermal energy to create of maintain a chemical reaction.
Features
≻ 3 Zone Furnace for temperature up to 1000℃
≻ Sample size : up to 2”
≻ Easy to sample loading & unloading by loading bar
≻ 3” dia. Quartz Tube
≻ Operation pressure ~ 1Torr
≻ No water cooling
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Specifications
제품 Specifications
Specifications
ITEM
SPECIFICATIONS
Dimension
1990(W) x 850(D) x 1200 (H)
Weight
250 kg
Loading bar
Sample retract & extend
Substrate
Size : Piece to 2 inch
Temperature
Heating: up to 1000℃ on substrate
Three zone controlled furnace
Vacuum Pumping
Rotary pump
Vacuum Gauge
Convection gauge
Gas Supply
Ar, H2, CH4, N2 MFC
Pressure control
Auto throttle valve & CDG sensor
Specifications
ITEM
SPECIFICATIONS
Dimension
1990(W) x 850(D) x 1200 (H)
Weight
250 kg
Loading bar
Sample retract & extend
Substrate
Size : Piece to 2 inch
Temperature
Heating: up to 1000℃ on substrate
Three zone controlled furnace
Vacuum Pumping
Rotary pump
Vacuum Gauge
Convection gauge
Gas Supply
Ar, H2, CH4, N2 MFC
Pressure control
Auto throttle valve & CDG sensor
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Options
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Control
제품 Control
System Control
Pumping
The figure shows the pumping screen. Pumping
screens have valves and pumps. The pump and
valve are easily operated with one touch.
Interlock
This picture shows the interlock screen. Basically,
the interlock is set so that it does not work when you
deviate from the correct method of use for your safety.
System Control
Pumping
The figure shows the pumping screen. Pumping
screens have valves and pumps. The pump and
valve are easily operated with one touch.
Interlock
This picture shows the interlock screen. Basically,
the interlock is set so that it does not work when you
deviate from the correct method of use for your safety.
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사용후기
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상품문의
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배송/교환정보
[배송]
배송 안내 입력전입니다.[교환]
교환/반품 안내 입력전입니다.
선택된 옵션
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KVC-C2000L+0원
