KVE-T4000 > Thermal Series
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제품 정보
제품 상세설명
Overview
KVT has developed the evaporator system with high precision deposition rate control
and unique design & technology. KVE series is designed and manufactured to
deposition equipment with variable item.
FEATURES
≻ Excellent thin film uniformity
≻ Vacuum compatible to 5.0E-7Torr
≻ Rotate the substrate.
≻ Stability rate
≻ Multi-layer processing
≻ Easy Manipulation
Overview
KVT has developed the evaporator system with high precision deposition rate control
and unique design & technology. KVE series is designed and manufactured to
deposition equipment with variable item.
FEATURES
≻ Excellent thin film uniformity
≻ Vacuum compatible to 5.0E-7Torr
≻ Rotate the substrate.
≻ Stability rate
≻ Multi-layer processing
≻ Easy Manipulation
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Specifications
제품 Specifications
SpecificationsITEM
Specifications
Process Chamber
Stainless steel
Vacuum Pumping Station
TMP / Cryo pump
Substrate Unit
Rotation / Heating / Cooling
Sample Size
4” ~ 12”
Power Supply Unit
10V,300A / 10V,100A
Source Type & Number
Boat, Crucible / up to 8
Process Control Type
Auto
Film Thickness Uniformity
< ±5%
Ultimate Pressure
< 5.0E-7Torr
Specifications
ITEM
Specifications
Process Chamber
Stainless steel
Vacuum Pumping Station
TMP / Cryo pump
Substrate Unit
Rotation / Heating / Cooling
Sample Size
4” ~ 12”
Power Supply Unit
10V,300A / 10V,100A
Source Type & Number
Boat, Crucible / up to 8
Process Control Type
Auto
Film Thickness Uniformity
< ±5%
Ultimate Pressure
< 5.0E-7Torr
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Options
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Control
제품 Control
System Control
Vacuum
This screen shows the pumping screen. This
screen consists of each valve, pump action button,
automatic button. The biggest difference from
Semi Auto is the automatic button, so if you
proceed with these buttons in sequence, one
sample will be completed.
Recipe
The figure shows the recipe screen.
This screen contains boxes for entering the
process conditions required for deposition. Input all
the boxes and press the Process button to
automatically deposit according to the input
process conditions.
Graph
The figure shows the graph screen. This
screen shows vacuum degree, power amount
thickness, deposition rate and so on. You can
record that data and make it into a file and
compare it with the previous data.
Message
The picture is a graph screen. The picture consistsof status message notification messages
System Control
Vacuum
This screen shows the pumping screen. This
screen consists of each valve, pump action button,
automatic button. The biggest difference from
Semi Auto is the automatic button, so if you
proceed with these buttons in sequence, one
sample will be completed.
Recipe
The figure shows the recipe screen.
This screen contains boxes for entering the
process conditions required for deposition. Input all
the boxes and press the Process button to
automatically deposit according to the input
process conditions.
Graph
The figure shows the graph screen. This
screen shows vacuum degree, power amount
thickness, deposition rate and so on. You can
record that data and make it into a file and
compare it with the previous data.Message
The picture is a graph screen. The picture consistsof status message notification messages -
사용후기
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상품문의
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배송/교환정보
[배송]
배송 안내 입력전입니다.[교환]
교환/반품 안내 입력전입니다.
선택된 옵션
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KVE-T4000+0원
