Thermal Evaporator System [KVE-T2000 Series) > Thermal Series
-
제품 정보
제품 상세설명
Overview
KVT has developed the evaporator system with high precision deposition rate control
and unique design & technology. KVE series is designed and manufactured to
deposition equipment with variable item.
FEATURES
≻ Excellent thin film uniformity
≻ Vacuum compatible to 5.0E-7Torr
≻ Rotate the substrate.
≻ Stability rate
≻ Multi-layer processing
≻ Easy Manipulation
Overview
KVT has developed the evaporator system with high precision deposition rate control
and unique design & technology. KVE series is designed and manufactured to
deposition equipment with variable item.
FEATURES
≻ Excellent thin film uniformity
≻ Vacuum compatible to 5.0E-7Torr
≻ Rotate the substrate.
≻ Stability rate
≻ Multi-layer processing
≻ Easy Manipulation
-
Specifications
제품 Specifications
Specifications
ITEM
Specifications
Process Chamber
Stainless steel
Vacuum Pumping Station
TMP / Cryo pump
Substrate Unit
Rotation / Heating / Cooling
Sample Size
4” or more
Power Supply Unit
10V,300A / 10V,100A
Source Type & Number
Boat, Crucible / Two or more
Process Control Type
Semi-auto
Film Thickness Uniformity
< ±5%
Ultimate Pressure
< 5.0E-7Torr
Specifications
ITEM
Specifications
Process Chamber
Stainless steel
Vacuum Pumping Station
TMP / Cryo pump
Substrate Unit
Rotation / Heating / Cooling
Sample Size
4” or more
Power Supply Unit
10V,300A / 10V,100A
Source Type & Number
Boat, Crucible / Two or more
Process Control Type
Semi-auto
Film Thickness Uniformity
< ±5%
Ultimate Pressure
< 5.0E-7Torr
-
Options
제품 Options
Option
Please contact the company for options regarding the deposition of special materials such as aluminum, lithium, indium, OLED, and perovskite.
Option
Please contact the company for options regarding the deposition of special materials such as aluminum, lithium, indium, OLED, and perovskite.
-
Control
제품 Control
System Control
Pumping
The figure shows the pumping screen. Pumping screens have valves and pumps. The pump and valve are easily operated with one touch.
Interlock
This picture shows the interlock screen. Basically, the interlock is set so that it does not work when you deviate from the correct method of use for your safety.
System Control
Pumping
The figure shows the pumping screen. Pumping screens have valves and pumps. The pump and valve are easily operated with one touch.
Interlock
This picture shows the interlock screen. Basically, the interlock is set so that it does not work when you deviate from the correct method of use for your safety.
-
사용후기
-
상품문의
-
배송/교환정보
[배송]
배송 안내 입력전입니다.[교환]
교환/반품 안내 입력전입니다.
선택된 옵션
-
Thermal Evaporator System [KVE-T2000 Series)+0원
![Thermal Evaporator System [KVE-T4000 Series]](https://www.koreavac.com/data/item/1754887861/thumb-15082181601_400x350.png)
![Thermal Evaporation System integrated with the Glove box [RVTG-4000]](https://www.koreavac.com/data/item/1779233195/thumb-DSC01119_400x350.png)
![Thermal Evaporation System with Glovebox & Loadlock Chamber [RVTG-2000]](https://www.koreavac.com/data/item/1779236714/thumb-KVETG2000_400x350.png)
![Thermal Evaporation System with Glovebox [RVTG-4000Li]](https://www.koreavac.com/data/item/1779243988/thumb-RVTG4000Li16kvs004_400x350.png)