Bench Top Sputter > Bench Top
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제품 정보
제품 상세설명
Overview
Korea Vacuum Tech, Ltd. (KVT) is proud to introduce the latest revolutionary
addition to our product line, the Intelsi-S, small vacuum system. Deposite its compact
convenient size, easy operation and affordability, functionality is in no way sacrificed.
The modular design of the Intelsi-S makes it highly configurable to meet specific
customer needs and numerous stock options are also available. A fully automated
Laptop PC helps round out this extremely usable yet robust diminutive package.
Advantages
≻ Easy to operate
≻ No cooling required
≻ Precise reproducible coating
≻ Fully adaptable to a wide range of specimens
≻ Easy loading and unloading of specimens
Features
≻ Extreme versatility
≻ High capacity vacuum pumping
≻ Fully automated PC control
≻ Capable of producing very thin resultant films
≻ Suitable for reactive gas deposition (O2, Ne etc.)
Applications
≻ Gold coating for SEM
≻ Metal Deposition such as Al, Au and so on
Overview
Korea Vacuum Tech, Ltd. (KVT) is proud to introduce the latest revolutionary
addition to our product line, the Intelsi-S, small vacuum system. Deposite its compact
convenient size, easy operation and affordability, functionality is in no way sacrificed.
The modular design of the Intelsi-S makes it highly configurable to meet specific
customer needs and numerous stock options are also available. A fully automated
Laptop PC helps round out this extremely usable yet robust diminutive package.
Advantages
≻ Easy to operate
≻ No cooling required
≻ Precise reproducible coating
≻ Fully adaptable to a wide range of specimens
≻ Easy loading and unloading of specimens
Features
≻ Extreme versatility
≻ High capacity vacuum pumping
≻ Fully automated PC control
≻ Capable of producing very thin resultant films
≻ Suitable for reactive gas deposition (O2, Ne etc.)
Applications
≻ Gold coating for SEM
≻ Metal Deposition such as Al, Au and so on
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Specifications
제품 Specifications
Specifications
ITEM
Intelsi – S
Intelsi - ST
System Dimensions
501mm(W) x 540mm(D) x 421mm(H) – 19.7” x 21.3” x 16.6”
Weight
35kg (77.2 lb)
Electrical / Compressed Air
110V/220V, Single Phase, 50/60Hz / 6~7kfg/cm2
Target Size
2 inch (50.8mm) diameter
Pumping Capability
Rotary Pump
Rotary & Turbo Molecular Pump
Gas Supply Unit
Metering Valve
Power
DC Power Supply
Ultimate Pressure
Less than 5.0E-3Torr
Less than 5.0E-6Torr
Operation
Auto pumping, Auto process and auto vent using PLC & Simple buttons
Deposition Source
Sputtering Cathode 1EA
Vacuum Gauge(Reading Range)
ATM to 5.0E-3Torr
ATM to 5.0E-6Torr
Throttle Valve
N/A
On/Off type
Film Thickness Uniformity
Less than ±5%
Optional Items
Substrate rotation & Z-motion, Substrate Heating, MFC
RF Power supply, QCM thickness Monitor
Specifications
ITEM
Intelsi – S
Intelsi - ST
System Dimensions
501mm(W) x 540mm(D) x 421mm(H) – 19.7” x 21.3” x 16.6”
Weight
35kg (77.2 lb)
Electrical / Compressed Air
110V/220V, Single Phase, 50/60Hz / 6~7kfg/cm2
Target Size
2 inch (50.8mm) diameter
Pumping Capability
Rotary Pump
Rotary & Turbo Molecular Pump
Gas Supply Unit
Metering Valve
Power
DC Power Supply
Ultimate Pressure
Less than 5.0E-3Torr
Less than 5.0E-6Torr
Operation
Auto pumping, Auto process and auto vent using PLC & Simple buttons
Deposition Source
Sputtering Cathode 1EA
Vacuum Gauge(Reading Range)
ATM to 5.0E-3Torr
ATM to 5.0E-6Torr
Throttle Valve
N/A
On/Off type
Film Thickness Uniformity
Less than ±5%
Optional Items
Substrate rotation & Z-motion, Substrate Heating, MFC
RF Power supply, QCM thickness Monitor -
Options
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Control
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사용후기
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상품문의
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배송/교환정보
[배송]
배송 안내 입력전입니다.[교환]
교환/반품 안내 입력전입니다.
선택된 옵션
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Bench Top Sputter+0원
