KVET-R2000L Seires > ETHCHER
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제품 정보
제품 상세설명
Overview
Reactive ion Etching (RIE) is an etching technology that utilizes chemically reactive
plasma to remove masked materials deposited on wafers during microfabrication. The
combination of an electromagnetic field in a low pressure (vacuum) environment is
used to create a plasma source from which high energy ions attack a wafer surface and
react.
Features
≻ High selectivity, uniform plasma etching
≻ Simple configuration makes maintenance easy
≻ Negative self-bias forms on lower electrode
≻ Low damage & contamination
Overview
Reactive ion Etching (RIE) is an etching technology that utilizes chemically reactive
plasma to remove masked materials deposited on wafers during microfabrication. The
combination of an electromagnetic field in a low pressure (vacuum) environment is
used to create a plasma source from which high energy ions attack a wafer surface and
react.
Features
≻ High selectivity, uniform plasma etching
≻ Simple configuration makes maintenance easy
≻ Negative self-bias forms on lower electrode
≻ Low damage & contamination
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Specifications
제품 Specifications
Specifications
ITEM
SPECIFICATIONS
System configuration
R&D
Substrate size
2” - 6” (50.8mm - 150mm)
Operating pressure (Torr)
< 30mTorr
Uniformity within substrate /
substrate to substrate surfaces
± 5% max.
Process Chamber
Al anodized Chamber
Substrate
Heating or cooling / Bias
Ultimate Pressure
1.0E-6Torr
Gas Nozzle
6” - 8” shower head type
Specifications
ITEM
SPECIFICATIONS
System configuration
R&D
Substrate size
2” - 6” (50.8mm - 150mm)
Operating pressure (Torr)
< 30mTorr
Uniformity within substrate /
substrate to substrate surfaces
± 5% max.
Process Chamber
Al anodized Chamber
Substrate
Heating or cooling / Bias
Ultimate Pressure
1.0E-6Torr
Gas Nozzle
6” - 8” shower head type
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Options
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Control
제품 Control
System Control
Pumping
The figure shows the pumping screen. Pumping
screens have valves and pumps. The pump and
valve are easily operated with one touch.
Gas Control
This picture shows the gas control screen.
Interlock
This picture shows the interlock screen.
Basically, the interlock is set so that it does not work
when you deviate from the correct method of use for
your safety.
System Control
Pumping
The figure shows the pumping screen. Pumping
screens have valves and pumps. The pump and
valve are easily operated with one touch.
Gas Control
This picture shows the gas control screen.
Interlock
This picture shows the interlock screen.
Basically, the interlock is set so that it does not work
when you deviate from the correct method of use for
your safety.
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사용후기
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상품문의
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배송/교환정보
[배송]
배송 안내 입력전입니다.[교환]
교환/반품 안내 입력전입니다.
선택된 옵션
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KVET-R2000L Seires+0원
