Overview

Aluminum is considered the most suitable material for fabricating Josephson junctions. The naturally formed thin, uniform oxide film (Al₂O₃) provides a stable insulating layer, enabling precise control of current and phase.Furthermore, its simple and highly reproducible process facilitates large-scale quantum chip fabrication, and its low noise makes it ideal for securing long qubit (coherence time) performance. These properties have made aluminum a key material for today's superconducting quantum computers.

Specifications

•  8” Samples

•  Robot - Armforsampleloading/unloading

•  Sputteringfor SiO2, TiN, iTO films

•  Substrate heater

•  Auto ProcessControl

Options

System Control