Overview

Niobium (Nb) sputtering is an essential process for fabricating Josephson junctions. Niobium possesses a higher critical temperature and more stable superconducting properties than aluminum, enabling the fabrication of highly reliable quantum devices. The uniform and dense films formed through this sputtering process are optimized for large-scale integrated circuit fabrication, positioning it as a key foundational technology driving the development of superconducting quantum computers.

Specifications

Options

- Plasma Cleaning

- RF/DC Bias Heater

- Automatic Control

- Etc... user requirements

System Control

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