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Cluster CVD & ICP-RIE System 요약정보 및 구매

A cluster system capable of mass production at once, realizing stable system operation and reproducibility(모든 공정을 한번에 처리 하고, 대량 생산에 최적화 되어 있는 클러스터 타입의 CVD & ICP-RIE 시스템)

- 3 Process chamber(2 CVD, 1 ICP-RIE)
- 1 Cassette chamber
- 1 Transfer chamber & Robot arm
- Full Automatic/Continuous and stable recipe and data management

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  • 제품 정보

    제품 상세설명

    Overview

     

    This system is a complex mass production platform in which multiple process chambers are combined around a single transfer module.


    Since this system enables continuous processes without atmospheric exposure, it has established itself as a standard solution in high-tech industries requiring both high-purity thin film deposition and high productivity.

    Overview

     

    This system is a complex mass production platform in which multiple process chambers are combined around a single transfer module.


    Since this system enables continuous processes without atmospheric exposure, it has established itself as a standard solution in high-tech industries requiring both high-purity thin film deposition and high productivity.

  • Specifications

    제품 Specifications

     Specifications

     

    - Etc... user requirements

     Specifications

     

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  • Options

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  • Control

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  • Cluster CVD & ICP-RIE System
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