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KVIS-4000L
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Applications
Multi-function System
Evaporator
Sputter
RTP
PLD
CVD
ALD
Vacuum Dryer
ETCHER
Cluster
Materials Division
KVS-1000 Series
KVS-2000 Series
KVS-4000 Series
KVS-6000 Serise
KVS-8000 Series
KVS-MC Series
IS-Series
Bench Top Sputter
KVIS-4000L
Sputter & Ion Beam Deposition System with Loadlock [KVIS-4000L]
A system capable of simultaneously performing ion beam and sputtering process(이온빔 어시스트 기능을 강화한 스퍼터 증착 시스템)
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![Sputter & Ion Beam Deposition System with Loadlock [KVIS-4000L]](https://www.koreavac.com/data/item/1754890760/thumb-15082167401_800x700.png)
A system capable of simultaneously performing ion beam and sputtering process(이온빔 어시스트 기능을 강화한 스퍼터 증착 시스템)