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KVA-CCP4000L
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Applications
Multi-function System
Evaporator
Sputter
RTP
PLD
CVD
ALD
Vacuum Dryer
ETCHER
Cluster
Materials Division
PEALD
ALD-CVD Series
KVA-CCP4000L
KVA-CCP4000L
The most basic form of PEALD system.(가장 기본적인 구성의 PEALD 시스템)
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