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KVET-R2000L Seires
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Applications
Multi-function System
Evaporator
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ETCHER
Cluster
Materials Division
ICP-RIE Series
RIE Series
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KVET-R2000L Seires
KVET-R4000
KVET-R2000L Seires
High-performance reactive ion etching system configured with a loadlock chamber.(로드락 챔버와 함께 구성된 고성능의 반응성 이온 에칭 시스템)
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High-performance reactive ion etching system configured with a loadlock chamber.(로드락 챔버와 함께 구성된 고성능의 반응성 이온 에칭 시스템)