Sputter Deposition System [KVS-1000] > Sputter
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제품 정보
제품 상세설명
Overview
"Eliminate unnecessary frills and make core performance more powerful."
We have drastically reduced the cost burden and elevated the inherent thin film deposition performance of sputtering to a new level.
Features
≻ Excellent Thickness Uniformity
The KVS Series RF&DC Sputtering System provide excellent thickness uniformity of resultant films even for substrates that have the same diameter as the sputtering cathode assembly
≻ No loadlock chamber
≻ Semi-auto system control by PLC
Overview
"Eliminate unnecessary frills and make core performance more powerful."
We have drastically reduced the cost burden and elevated the inherent thin film deposition performance of sputtering to a new level.
Features
≻Excellent Thickness Uniformity
The KVS Series RF&DC Sputtering System provide excellent thickness uniformity of resultant films even for substratesthat have the same diameter as the sputtering cathode assembly
≻No loadlock chamber
≻Semi-auto system control by PLC
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Specifications
제품 Specifications
Specifications
ITEM
SPECIFICATIONS
Process Chamber
Stainless steel
Vacuum Pumping Station
Turbo molecular pump
Substrate Heating Unit
SiC / 2”
Pressure Control Unit
Manual / Semi-Automatic
Vacuum Gauge Controller
ATM ~ 1.0E-10Torr
Gas Supply Unit
MFC (Ar, O2, N2, H2, etc..)
Power Supply Unit
RF / DC / Pulsed DC
Target Size
2”
Film Thickness Uniformity
Less than ± 4.99 %
Ultimate Pressure
Less than 1.99E-6 Torr
Specifications
ITEM
SPECIFICATIONS
Process Chamber
Stainless steel
Vacuum Pumping Station
Turbo molecular pump
Substrate Heating Unit
SiC / 2”
Pressure Control Unit
Manual / Semi-Automatic
Vacuum Gauge Controller
ATM ~ 1.0E-10Torr
Gas Supply Unit
MFC (Ar, O2, N2, H2, etc..)
Power Supply Unit
RF / DC / Pulsed DC
Target Size
2”
Film Thickness Uniformity
Less than ± 4.99 %
Ultimate Pressure
Less than 1.99E-6 Torr
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Options
제품 Options
Options
- Power Selection
- Automatic Control
- Etc... user requirements
Options
- Power Selection
- Automatic Control
- Etc... user requirements
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Control
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사용후기
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상품문의
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배송/교환정보
[배송]
배송 안내 입력전입니다.[교환]
교환/반품 안내 입력전입니다.
선택된 옵션
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