코리아바큠테크

Specialized company in the development of vacuum system
for semiconductor device fabrication

KOREA VACUUM TECH

Specialized company in the development of vacuum system
for semiconductor device fabrication

KOREA VACUUM TECH

Specialized company in the development of vacuum system
for semiconductor device fabrication

KOREA VACUUM TECH

Specialized company in the development of vacuum system
for semiconductor device fabrication

KOREA VACUUM TECH

Specialized company in the development of vacuum system
for semiconductor device fabrication

KOREA VACUUM TECH

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Applications

코리아바큠테크의 Applications 제품입니다.

Multi-functional Vacuum System [JDR-E Series]

By maximizing the unique properties of aluminum, the JDR-E series delivers the ultimate hardware solution for producing top-tier Josephson junctions.(조셉슨 소자를 만들기 위해 필요한 모든 공정이 한번에 가능한 복합 진공 시스템)
Cluster-type PVD System with Glovebox [KVE-TG4000L]

Mini Cluster Deposition System for Micro LED Device Development(마이크로 LED 소자 개발을 위해 최적화 된 클러스터 타입의 증착 시스템)
Thermal Evaporation System with Glovebox [RVTG-4000Li]

Thermal evaporation system for lithium thin films(리튬 박막을 증착하기 위해 최적화 된 열 증착 시스템)
Thermal Evaporation System with Glovebox & Loadlock Chamber [RVTG-2000]

A thermal evaporator system combining a loadlock chamber and a glove box(로드락 챔버와 글러브 박스가 결합되어 있는 써멀 증착 시스템)

Multi-function System

코리아바큠테크의 Multi-function System 제품입니다.

Multi-function PVD System

By seamlessly integrating E-beam and Sputtering into a single high-vacuum chamber, the Multi-Function PVD System delivers the ultimate In-situ solution for fabricating ultra-pure, multi-layer devices without interfacial contamination.(이빔과 스퍼터 공정이 가능한 UHV 타입의 고성능 진공 증착 시스템)

Evaporator

코리아바큠테크의 Evaporator 제품입니다.

Dual E-Beam Co-Deposition System [KVE-ED Series]

Complete alloy and multilayer thin film solutions realized in a single process.(두개의 이빔으로 동시 증착이 가능한 진공 시스템)
Thermal Evaporation System integrated with the Glove box [RVTG-4000]

By seamlessly integrating a pristine glovebox environment with high-vacuum Evaporator Thermal, the RVTG-4000 provides the definitive platform for fabricating next-generation perovskite solar cells.(페로브스카이트 공정에 최적화 되어 있는 글러브 박스 결합형 써멀 증착 시스템)
E-Beam & Sputter System [KVE-ES Series]

A combined vacuum system capable of e-beam and sputtering processes in a single chamber.(한 챔버에서 이빔 공정과 스퍼터 공정이 가능한 진공 시스템)
Ion-beam Assisted E-beam Evaporation System [KVE-EI Series]

E-beam evaporation system with enhanced thin film properties using ion-beam assist function.(이온빔 보조 기능으로 박막의 특성을 강화한 이빔 증착 시스템)

Sputter

코리아바큠테크의 Sputter 제품입니다.

Sputter Deposition System [KVS-1000]

Lowest price, high performance sputtering system(가장 합리적인 가격의 고성능 스퍼터 시스템)
Bench Top Sputter Deposition System

This equipment is a high-performance sputtering system capable of stably depositing Au/Pt metals up to 100 nm, as well as sample pretreatment for SEM analysis.(SEM 분석에 필요한 귀금속 증착이 가능한 간단한 구성의 스퍼터 시스템)
Sputter Deposition System [KVS-2000]

The most basic sputtering system(대학 및 연구소에 적합한 기본적인 구성의 스퍼터 시스템)
Sputter Deposition System with Loadlock [KVS-2000L]

Basic sputtering system configured with a loadlock chamber(로드락 챔버로 성능을 강화한 기본적인 구성의 스퍼터 시스템)

RTP

코리아바큠테크의 RTP 제품입니다.

Rapid Thermal Annealing System [KVR-8000 Series]

Rapid thermal process system optimized for 8" samples.(8인치 샘플에 최적화 된 급속열처리 시스템)
Rapid Thermal Annealing System [KVR-6000 Series]

Rapid thermal process system optimized for 6" samples.(6인치 샘플에 최적화 된 급속열처리 시스템)
Rapid Thermal Annealing System [KVR-4000 Series]

Rapid thermal process system optimized for 4" samples.(4인치 샘플에 최적화 된 급속열처리 시스템)
Rapid Thermal Annealing System [KVR-2000 Series]

Rapid thermal process system optimized for 2" samples.(2인치 샘플에 최적화 된 급속열처리 시스템)

PLD

코리아바큠테크의 PLD 제품입니다.

High Pressure RHEED-PLD System

We provide unrivaled solutions for limitless epitaxial thin film research, ranging from complex oxides with complex chemical compositions to quantum computing and next-generation semiconductor new materials.(고성능 펄스 레이저 증착 시스템)
KVP-2000

The most basic PLD system(가장 기본적인 펄스 레이저 증착 시스템)
KVP-2000L

The most basic PLD system with loadlock chamber(로드락 챔버와 함께 구성된 기본적인 구성의 펄스 레이저 증착 시스템)

CVD

코리아바큠테크의 CVD 제품입니다.

RMH-2000
Spinnable CNT Deposition System
KVC-T2000L

Thermal CVD Series
KVC-P4000L

PECVD Series

ALD

코리아바큠테크의 ALD 제품입니다.

KVAC-4000L

ALD-CVD Series
KVA-CCP4000L

PEALD

Vacuum Dryer

코리아바큠테크의 Vacuum Dryer 제품입니다.

Halogen Vacuum Dryer
Vacuum Dryer

VACUUM DRYER for LiB(리튬 베터리 대량 생산에 최적화 된 양산용 건조기)

ETCHER

코리아바큠테크의 ETCHER 제품입니다.

JDR-I Series

With free control of the ion beam incidence angle and a real-time monitoring system, it enables precise etching profiles even in complex nanostructures and minimizes sample damage.(양산 라인 디바이스 제조 공정에 적용 가능한 고성능 이온빔 에칭 시스템)
KVET-IM2000L

Basic ion beam etching system suitable for research environments.(연구 환경에 적합한 기본적인 이온빔 에칭 시스템)
KVET-R4000

The most basic configuration of an RIE system for research purposes.(연구용으로 적합한 기본적인 구성의 반응성 이온 에칭 시스템)
KVET-R2000L Seires

High-performance reactive ion etching system configured with a loadlock chamber.(로드락 챔버와 함께 구성된 고성능의 반응성 이온 에칭 시스템)

Cluster

코리아바큠테크의 Cluster 제품입니다.

Cluster CVD & ICP-RIE System

A cluster system capable of mass production at once, realizing stable system operation and reproducibility(모든 공정을 한번에 처리 하고, 대량 생산에 최적화 되어 있는 클러스터 타입의 CVD & ICP-RIE 시스템)
Cluster Sputtering System

A cluster system capable of mass production at once, realizing stable system operation and reproducibility(모든 공정을 한번에 처리 하고, 대량 생산에 최적화 되어 있는 클러스터 타입의 스퍼터 시스템)

Materials Division

코리아바큠테크의 Materials Division 제품입니다.

QCM Sensor

박막의 증착 속도/두께 확인을 위한 센서
Evaporation Materials

이빔/써멀 증착기에 사용하는 소스
Cruciblbe Liner (Ceramic)

이빔 증착에 사용하는 세라믹 도가니 제품
Crucible Liner (Metal)

이빔 증착에 사용하는 금속 도가니 제품

Company

About Us · History · Organization · R&D

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Notice

코리아바큠테크 블로그를 새로 시작합니다.	2026-04-14
경력사원 이력서 양식	2025-08-28
신입사원 이력서 양식	2025-08-28

팝업레이어 알림

Specialized company in the development of vacuum system
for semiconductor device fabrication

KOREA VACUUM TECH

Specialized company in the development of vacuum system
for semiconductor device fabrication

KOREA VACUUM TECH

Specialized company in the development of vacuum system
for semiconductor device fabrication

KOREA VACUUM TECH

Specialized company in the development of vacuum system
for semiconductor device fabrication

KOREA VACUUM TECH

Specialized company in the development of vacuum system
for semiconductor device fabrication

KOREA VACUUM TECH

Applications

Multi-function System

Evaporator

Sputter

RTP

PLD

CVD

ALD

Vacuum Dryer

ETCHER

Cluster

Materials Division

Company

Support

Contact

Notice

Location

Inquiry

팝업레이어 알림

Specialized company in the development of vacuum system for semiconductor device fabrication

KOREA VACUUM TECH

Specialized company in the development of vacuum system for semiconductor device fabrication

KOREA VACUUM TECH

Specialized company in the development of vacuum system for semiconductor device fabrication

KOREA VACUUM TECH

Specialized company in the development of vacuum system for semiconductor device fabrication

KOREA VACUUM TECH

Specialized company in the development of vacuum system for semiconductor device fabrication

KOREA VACUUM TECH

Applications

Multi-function System

Evaporator

Sputter

RTP

PLD

CVD

ALD

Vacuum Dryer

ETCHER

Cluster

Materials Division

Company

Support

Contact

Notice

Location

Inquiry

Specialized company in the development of vacuum system
for semiconductor device fabrication

Specialized company in the development of vacuum system
for semiconductor device fabrication

Specialized company in the development of vacuum system
for semiconductor device fabrication

Specialized company in the development of vacuum system
for semiconductor device fabrication

Specialized company in the development of vacuum system
for semiconductor device fabrication